Thermal conductivity sensor for binary gas analysis
Thermal Conductivity Gas Analyzer
The thermal conductivity of hydrogen is the highest of all gases, and the thermal conductivity of mixed gases directly depends on the hydrogen content. The hydrogen levels are measured by measuring the thermal conductivity of the mixed gases, and the accuracy of the analyzer depends on the sensitivity of the temperature sensor. The micro-sensor is fabricated using a micromachining process, and achieves a resolution of 0.001.